Video: Niobium Oxide Films Deposited by Reactive Sputtering: Effect of Oxygen Flow Rate
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jove.com
Video: Niobium Oxide Films Deposited by Reactive Sputtering: Effect of Oxygen Flow Rate
7.5K Views. Federal University of São Carlos (UFSCAR). In the reactive sputter technique it's possible to have a fine control of the parameters which allows to deposit niobium oxide fume with different stochiometer and preference. The main advantage of this technique is the deposition of homogenous fumes with good adhesion over large areas and ...
7.6K viewsSep 28, 2019
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